Studies on Air Pollutants by Thin Metal Film
نویسندگان
چکیده
منابع مشابه
Metal-organic thin-film encapsulation for MEMS
This paper demonstrates a metal-organic thin-film encapsulation technique based on the photolithography of multiple layers of positive-tone photo-definable polymer. This encapsulation process, performed at low temperatures (<110 ◦C) in a standard basic developer, leaves no residue. Piezoelectrically-actuated length-extensional bulk acoustic wave resonators were successfully encapsulated for a p...
متن کاملMetal-Semiconductor Interfaces in Thin-Film Transistors
The metal-semiconductor interface in thin-film transistors (TFTs) is one of the bottlenecks on the development of these devices. Although this interface does not play an active role in the transistor operation, a low-quality interface can be responsible for a low performance operation. In a-Si TFTs, a doped film can be used to improve this interface, however, in other TFT technologies, there is...
متن کاملSpreading of thin-film metal patterns deposited on nonplanar surfaces
The application of a three dimensional, self-aligning shadow mask in 110 -oriented silicon for thin-film metal deposition is discussed. This shadow mask is used for the deposition of metal tracks on the bottom of structures with vertical sidewalls, i.e., the patterning of metal catalytic patches underneath the membrane that covers the deep flow channel of a high-temperature gas microreactor. Th...
متن کاملCriteria air pollutants and toxic air pollutants.
This review presents a brief overview of the health effects and exposures of two criteria pollutants--ozone and particulate matter--and two toxic air pollutants--benzene and formaldehyde. These pollutants were selected from the six criteria pollutants and from the 189 toxic air pollutants on the basis of their prevalence in the United States, their physicochemical behavior, and the magnitude of...
متن کاملExtraordinary light transmission through opaque thin metal film with subwavelength holes blocked by metal disks.
We observed that when subwavelength-sized holes in an optically opaque metal film are completely covered by opaque metal disks larger than the holes, the light transmission through the holes is not reduced, but rather enhanced. Particularly we report (i) the observation of light transmission through the holes blocked by the metal disks up to 70% larger than the unblocked holes; (ii) the observa...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sangyo Igaku
سال: 1967
ISSN: 0047-1879,1881-1302
DOI: 10.1539/joh1959.9.3_248_3